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RSU International Research Conference 2020

Year: 2020

Effect of Total Pressure on the Structure of TiCrN Thin Films Prepared from Mosaic Target by Reactive DC Magnetron Sputtering

Siriwat Alaksanasuwan, Adisorn Buranawong, and Nirun Witit-anun

Pages: 51-57

Keywords: TiCrN, Thin films, Reactive magnetron sputtering, Total pressure, Mosaic target

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